Problem svgcoat2 SNF 2010-02-10 13:47:15: particles on coated wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 10 14:37:51 PST 2010


cleaned catch cup hotplate and belts, cycled wafers , Uniformity Looks Good and bottom Wafers are coming out clean. 




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