Problem svgcoat2 SNF 2010-02-11 19:53:04: SVG Track 2 - 3612 dispense
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Fri Feb 12 12:20:27 PST 2010
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Problem svgcoat2 SNF 2010-02-11 19:53:04: SVG Track 2 - 3612 dispense
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Problem svgcoat2 SNF 2010-02-12 13:11:27: broken wafer in spin bowl
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Purged air out of dispense line. Tested OK.
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Problem svgcoat2 SNF 2010-02-11 19:53:04: SVG Track 2 - 3612 dispense
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Problem svgcoat2 SNF 2010-02-12 13:11:27: broken wafer in spin bowl
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