Problem svgcoat2 SNF 2010-02-12 13:11:27: broken wafer in spin bowl

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Feb 12 13:11:28 PST 2010


For some reason, 1 wafer out of 12 loaded off center on the spin chuck and broke apart during very loud unbalanced spin cycle.  The wafer right after loaded just fine on the spin chuck.




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