Problem svgcoat2 SNF 2010-02-14 21:21:57: EBR program 4

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sun Feb 14 21:21:57 PST 2010


I ran 13 wafers using prog 4 4umw/oVP   and  on some (not all) wafers it looked like the EBR had dripped at the edge of the wafers.  It didn't look like a resist spin defect,  more like a possible EBR problem.  




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