Problem svgcoat2 SNF 2010-02-12 13:11:27: broken wafer in spin bowl

vilanova at vilanova at
Tue Feb 16 08:12:19 PST 2010

cleaned catch cup and removed broken wafer pieces, Cycled wafers
( program 4 , 7, 5, ) and EBR looks Good, Also checked wafers 
centering position cycled wafers , wafer centering Looks within spec.
Cleaned dummy wafers Ok to use. 

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