Problem svgcoat2 SNF 2010-02-23 18:32:19: photoresist on back of wafers

damodei at snf.stanford.edu damodei at snf.stanford.edu
Tue Feb 23 18:32:20 PST 2010


Small streaks of photoresist are being deposited on the back of every wafer by the track.  They seem to be at about 5 o'clock relative to the flat, which is exactly where hotspots on the ASML have been showing up.




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