Problem svgcoat2 SNF 2010-02-23 18:32:19: photoresist on back of wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 24 08:57:03 PST 2010

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Hotplate was cleaned when we got here this morning, Cleaned belts 
and cycled  wafers, NO wet or particles , streaks on back of wafers,.
Ok to use

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