Problem svgcoat2 SNF 2010-02-23 20:34:54: resist baked onto hotplate

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 24 08:57:17 PST 2010


Hotplate was cleaned when we got here this morning, Cleaned belts 
and cycled  wafers, NO wet or particles , streaks on back of wafers,.
Ok to use 




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