Comment svgcoat2 SNF 2010-02-25 08:59:52: maintenance Completed. :-)

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Feb 25 08:59:52 PST 2010

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cleaned catch cup belts  HMDS Hotplate ( super clean now ) 
Cleaned dummy wafers ( coat and developer ) Cleaned Post bake
Hotplate, Tested ok to use.

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