Problem svgcoat2 SNF 2010-02-25 18:16:39: 3612 resis. level low alarm

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Feb 26 08:34:40 PST 2010


1) Resist Bottle was Full, there was A bubble in the line, Purged Line 
and cycled wafers , Ok to use.
2) HMDS station got stuck on bottom position , Realigned carrier
and Lubricated HMDS Up/Down Arm, Tested, Ok to use. 




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