Problem svgcoat2 SNF 2010-02-25 18:16:39: 3612 resis. level low alarm

[vilanova at snf.stanford.edu]

1) Resist Bottle was Full, there was A bubble in the line, Purged Line 
and cycled wafers , Ok to use.
2) HMDS station got stuck on bottom position , Realigned carrier
and Lubricated HMDS Up/Down Arm, Tested, Ok to use.