Problem svgcoat2 SNF 2010-02-26 00:32:18: Vapor Prime Fail

vilanova at vilanova at
Fri Feb 26 08:34:47 PST 2010

1) Resist Bottle was Full, there was A bubble in the line, Purged Line 
and cycled wafers , Ok to use.
2) HMDS station got stuck on bottom position , Realigned carrier
and Lubricated HMDS Up/Down Arm, Tested, Ok to use. 

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