From mahnaz at snf.stanford.edu Mon Jan 4 15:05:09 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 4 Jan 2010 15:05:09 -0800 Subject: Comment svgcoat2 SNF 2010-01-04 15:05:08: 3612 1um and 1.6 um Message-ID: both sender and reciever makes loud noise. wafers were off center and had rough EBR. thicknesss for 1um 10240A Thickness for 1.6 um 16800 A From gsosa at snf.stanford.edu Mon Jan 4 16:28:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Jan 2010 16:28:49 -0800 Subject: Comment svgcoat2 SNF 2010-01-04 16:28:48: Update 1/4/1- Message-ID: Cleaned and lubricated lead screws on both send and receive indexers.Indexers now travel smoothlty up and down. Checked and adjusted wafer centering and checked EBR width and cut. Looks OK now that wafer is centered. From gsosa at snf.stanford.edu Mon Jan 4 16:30:06 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Jan 2010 16:30:06 -0800 Subject: Comment svgcoat2 SNF 2010-01-04 16:30:05: 955-07 Thickness 1/4/10 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(9 points): 6813 Angstroms, Std Dev. 18 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From mahnaz at snf.stanford.edu Tue Jan 5 11:05:38 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 5 Jan 2010 11:05:38 -0800 Subject: Comment svgcoat2 SNF 2010-01-05 11:05:37: 3um Message-ID: Ran a test thckness 29725A From mahnaz at snf.stanford.edu Tue Jan 5 11:08:14 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 5 Jan 2010 11:08:14 -0800 Subject: Problem svgcoat2 SNF 2010-01-05 11:08:14: speed boat/3um Message-ID: Ran a test on 220-3 the thickness is withn the spec. I cleaned the nozzle and ran 5 dummies and the sample wafers came out with real bad spead boates and rough EBR. From gsosa at snf.stanford.edu Wed Jan 6 07:42:30 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 6 Jan 2010 07:42:30 -0800 Subject: Problem svgcoat2 SNF 2009-11-27 22:04:56: VP holder got stuck Message-ID: Adjusted wire lifters and calibrated lifter position. Tested operation. All OK. From gsosa at snf.stanford.edu Wed Jan 6 07:42:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 6 Jan 2010 07:42:45 -0800 Subject: Comment svgcoat2 SNF 2009-11-30 08:11:12: HMDS Hotplate station Back On Message-ID: Adjusted wire lifters and calibrated lifter position. Tested operation. All OK. From mahnaz at snf.stanford.edu Wed Jan 6 11:26:26 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 6 Jan 2010 11:26:26 -0800 Subject: Problem svgcoat2 SNF 2010-01-06 11:26:25: 3um Message-ID: ran many wafers all the dummies came out good and the real wafers BAD. Gary has made improvment and will work on it later. From chen0622 at snf.stanford.edu Wed Jan 13 12:04:18 2010 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Wed, 13 Jan 2010 12:04:18 -0800 Subject: Problem svgcoat2 SNF 2010-01-13 12:04:17: wafer stucked on the chuck by vacuum Message-ID: From vilanova at snf.stanford.edu Wed Jan 13 14:49:31 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jan 2010 14:49:31 -0800 Subject: Problem svgcoat2 SNF 2010-01-13 12:04:17: wafer stucked on the chuck by vacuum Message-ID: removed wafer and cycled wafers ( Auto + manual ) ok to use. From vilanova at snf.stanford.edu Thu Jan 14 08:35:52 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jan 2010 08:35:52 -0800 Subject: Problem svgcoat2 SNF 2010-01-05 11:08:14: speed boat/3um Message-ID: Cleaned Dispense Hose , cycled dummy wafers ( 10 each ) Uniformity + EBR looks Good, Ok to use From vilanova at snf.stanford.edu Thu Jan 14 08:36:31 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jan 2010 08:36:31 -0800 Subject: Problem svgcoat2 SNF 2010-01-06 11:26:25: 3um Message-ID: Cleaned Dispense Hose and cycled wafers ( 10 Each ) Uniformity + EBR looks Good. Ok to use. From mmessana at snf.stanford.edu Sat Jan 16 16:48:13 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Sat, 16 Jan 2010 16:48:13 -0800 Subject: Problem svgcoat2 SNF 2010-01-16 16:48:12: won't move wafers to hotplate Message-ID: after coat finishes, head doesn't come up to move wafer to hot plate. tried resetting the track several times. other user reported someone had the same problem this morning but apparently didn't report it. From wangss at snf.stanford.edu Sun Jan 17 14:46:43 2010 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Sun, 17 Jan 2010 14:46:43 -0800 Subject: Problem svgcoat2 SNF 2010-01-17 14:46:43: clean room dummy stopped at spin station Message-ID: could not go through the process and one dummy wafer left in spin stage. From mmessana at snf.stanford.edu Mon Jan 18 10:24:06 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Mon, 18 Jan 2010 10:24:06 -0800 Subject: Problem svgcoat2 SNF 2010-01-18 10:24:05: Input Cassette Not Sending Message-ID: spin coating in manual mode works fine however From kuanlinc at snf.stanford.edu Mon Jan 18 15:51:22 2010 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Mon, 18 Jan 2010 15:51:22 -0800 Subject: Problem svgcoat2 SNF 2010-01-18 15:51:21: 1 um program not uniform Message-ID: Ran 2 clean dummies in manual mode. Coating was not uniform. From gsosa at snf.stanford.edu Tue Jan 19 11:23:05 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:23:05 -0800 Subject: Problem svgcoat2 SNF 2010-01-16 16:48:12: won't move wafers to hotplate Message-ID: Checked and tested operation. All looks good. System possibly affected by the lab temperature. All OK now. From gsosa at snf.stanford.edu Tue Jan 19 11:23:10 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:23:10 -0800 Subject: Problem svgcoat2 SNF 2010-01-17 14:46:43: clean room dummy stopped at spin station Message-ID: Checked and tested operation. All looks good. System possibly affected by the lab temperature. All OK now. From gsosa at snf.stanford.edu Tue Jan 19 11:23:15 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:23:15 -0800 Subject: Problem svgcoat2 SNF 2010-01-18 10:24:05: Input Cassette Not Sending Message-ID: Checked and tested operation. All looks good. System possibly affected by the lab temperature. All OK now. From gsosa at snf.stanford.edu Tue Jan 19 11:23:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Jan 2010 11:23:21 -0800 Subject: Problem svgcoat2 SNF 2010-01-18 15:51:21: 1 um program not uniform Message-ID: Checked and tested operation. All looks good. System possibly affected by the lab temperature. All OK now. From ykwon at snf.stanford.edu Sat Jan 23 14:59:01 2010 From: ykwon at snf.stanford.edu (ykwon at snf.stanford.edu) Date: Sat, 23 Jan 2010 14:59:01 -0800 Subject: Problem svgcoat2 SNF 2010-01-23 14:59:01: sender station does not reset Message-ID: the previous user left the wafers (maybe there are all dummy?) on the machine. I left those wafers on the table where control computers are, behind the moniters. I tried to reset the machine, but I sender station would not reset. I've decided to use svgcoat1 instead. From ocakkaya at snf.stanford.edu Sun Jan 24 14:58:07 2010 From: ocakkaya at snf.stanford.edu (ocakkaya at snf.stanford.edu) Date: Sun, 24 Jan 2010 14:58:07 -0800 Subject: Problem svgcoat2 SNF 2010-01-24 14:58:07: Drain alarm is on for Track2 Message-ID: From vilanova at snf.stanford.edu Mon Jan 25 07:38:05 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jan 2010 07:38:05 -0800 Subject: Problem svgcoat2 SNF 2010-01-23 14:59:01: sender station does not reset Message-ID: checked sender and receiver indexers Both are working fine, ok to use. From vilanova at snf.stanford.edu Mon Jan 25 07:38:49 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jan 2010 07:38:49 -0800 Subject: Problem svgcoat2 SNF 2010-01-24 14:58:07: Drain alarm is on for Track2 Message-ID: small drain container has been emptied , ok to use. From jimkruger at snf.stanford.edu Tue Jan 26 10:17:21 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Tue, 26 Jan 2010 10:17:21 -0800 Subject: Problem svgcoat2 SNF 2010-01-26 10:17:21: Belt rails at COAT will not drop wafer Message-ID: May low air pressure again?? Manual assist allows wafer to drop. From vilanova at snf.stanford.edu Tue Jan 26 10:55:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 26 Jan 2010 10:55:21 -0800 Subject: Problem svgcoat2 SNF 2010-01-26 10:17:21: Belt rails at COAT will not drop wafer Message-ID: checked system and cycled many wafers , COuldnt repeat the problem, ok to use.. From mahnaz at snf.stanford.edu Fri Jan 29 10:12:30 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Jan 2010 10:12:30 -0800 Subject: Comment svgcoat2 SNF 2010-01-29 10:11:27: cleaned all the dummies Message-ID: