Comment svgcoat2 SNF 2010-01-04 16:30:05: 955-07 Thickness 1/4/10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jan 4 16:30:06 PST 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6813  Angstroms, Std Dev. 18 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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