Problem svgcoat2 SNF 2010-01-05 11:08:14: speed boat/3um

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Jan 5 11:08:14 PST 2010


Ran a test on 220-3 the thickness is withn the spec. 
I cleaned the nozzle and ran 5 dummies and the sample wafers came
out with real bad spead boates and rough EBR.




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