Problem svgcoat2 SNF 2010-01-13 12:04:17: wafer stucked on the chuck by vacuum

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jan 13 14:49:31 PST 2010

Previous message: Problem svgcoat2 SNF 2010-01-13 12:04:17: wafer stucked on the chuck by vacuum
Next message: Problem svgcoat2 SNF 2010-01-16 16:48:12: won't move wafers to hotplate
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

removed wafer and cycled wafers ( Auto  + manual )  ok to use.

Previous message: Problem svgcoat2 SNF 2010-01-13 12:04:17: wafer stucked on the chuck by vacuum
Next message: Problem svgcoat2 SNF 2010-01-16 16:48:12: won't move wafers to hotplate
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat2-pcs mailing list