Problem svgcoat2 SNF 2010-01-05 11:08:14: speed boat/3um

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jan 14 08:35:52 PST 2010


Cleaned Dispense Hose , cycled dummy wafers ( 10 each ) 
Uniformity + EBR  looks Good, Ok to use




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