Problem svgcoat2 SNF 2010-01-06 11:26:25: 3um
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Jan 14 08:36:31 PST 2010
Cleaned Dispense Hose and cycled wafers ( 10 Each )
Uniformity + EBR looks Good. Ok to use.
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