Problem svgcoat2 SNF 2010-01-16 16:48:12: won't move wafers to hotplate

mmessana at snf.stanford.edu mmessana at snf.stanford.edu
Sat Jan 16 16:48:13 PST 2010


after coat finishes, head doesn't come up to move wafer to hot plate.  tried resetting the track several times.  other user reported someone had the same problem this morning but apparently didn't report it.  




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