From vilanova at snf.stanford.edu  Thu Jul  8 08:39:10 2010
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 8 Jul 2010 08:39:10 -0700
Subject: Comment svgcoat2 SNF 2010-07-08 08:39:09: cleaned Up hotplates , Chuck and also Secondary contaiment Under System recovery jug. 
Message-ID: <mailman.887.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Fri Jul  9 08:28:59 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 9 Jul 2010 08:28:59 -0700
Subject: Comment svgcoat2 SNF 2010-07-09 08:28:58: 955 0.7um Thickness Test 7/9/10
Message-ID: <mailman.888.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>

Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6933  Angstroms, Std Dev. 5 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.



From gth at snf.stanford.edu  Fri Jul  9 15:11:13 2010
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Fri, 9 Jul 2010 15:11:13 -0700
Subject: Problem svgcoat2 SNF 2010-07-09 15:11:12: low on 3612 PR
Message-ID: <mailman.889.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>




From mahnaz at snf.stanford.edu  Fri Jul  9 15:54:47 2010
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Fri, 9 Jul 2010 15:54:47 -0700
Subject: Comment svgcoat2 SNF 2010-07-09 15:54:46: changed the 3612 bottle
Message-ID: <mailman.890.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>

gth helped.



From gsosa at snf.stanford.edu  Mon Jul 12 06:48:59 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 12 Jul 2010 06:48:59 -0700
Subject: Problem svgcoat2 SNF 2010-07-09 15:11:12: low on 3612 PR
Message-ID: <mailman.891.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>

Bottle changedon 7/9



From gsosa at snf.stanford.edu  Mon Jul 12 06:49:05 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Mon, 12 Jul 2010 06:49:05 -0700
Subject: Comment svgcoat2 SNF 2010-07-09 15:54:46: changed the 3612 bottle
Message-ID: <mailman.892.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>

Bottle changedon 7/9



From gsosa at snf.stanford.edu  Fri Jul 23 14:44:25 2010
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 23 Jul 2010 14:44:25 -0700
Subject: Comment svgcoat2 SNF 2010-07-23 14:44:24: 955 0.7um thickness 7/23
Message-ID: <mailman.893.1356283437.4703.svgcoat2-pcs@snf.stanford.edu>

Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6894  Angstroms, Std Dev. 8 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.