Comment svgcoat2 SNF 2010-07-09 08:28:58: 955 0.7um Thickness Test 7/9/10

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jul 9 08:28:59 PDT 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6933  Angstroms, Std Dev. 5 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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