From vilanova at snf.stanford.edu Tue Jun 1 07:25:54 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Jun 2010 07:25:54 -0700 Subject: Problem svgcoat2 SNF 2010-05-29 20:05:56: Coating chuck belt drive doesn't work Message-ID: checked belts , Ok, Secondary Resist contaiment was Probably full , I found the Alarm On top Turned Off , checked system and cycled wafers System ok to use. From gsosa at snf.stanford.edu Mon Jun 7 14:13:45 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Jun 2010 14:13:45 -0700 Subject: Comment svgcoat2 SNF 2010-06-07 14:13:45: 955 0.7um Thickness Test 6/7 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(9 points): 6953 Angstroms, Std Dev. 12 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From gth at snf.stanford.edu Mon Jun 14 01:39:41 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Mon, 14 Jun 2010 01:39:41 -0700 Subject: Problem svgcoat2 SNF 2010-06-14 01:39:41: 3612 bottle empty. Message-ID: From vilanova at snf.stanford.edu Mon Jun 14 07:53:54 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 Jun 2010 07:53:54 -0700 Subject: Problem svgcoat2 SNF 2010-06-14 01:39:41: 3612 bottle empty. Message-ID: eplaced empty 3612 resist bottle purged line cycled wafers ok to use. From gsosa at snf.stanford.edu Wed Jun 16 09:35:01 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 16 Jun 2010 09:35:01 -0700 Subject: Shutdown svgcoat2 SNF 2010-06-16 09:35:00: Hotplate Vacuum Message-ID: Hotplate vacuum problem From gsosa at snf.stanford.edu Wed Jun 16 11:52:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 16 Jun 2010 11:52:04 -0700 Subject: Shutdown svgcoat2 SNF 2010-06-16 09:35:00: Hotplate Vacuum Message-ID: Cleaned grooves and vacuum holes in hotplate surface. Cleaned the vacuum solenoid. Tested track operation- OK From gsosa at snf.stanford.edu Fri Jun 18 08:59:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Jun 2010 08:59:25 -0700 Subject: Comment svgcoat2 SNF 2010-06-18 08:59:24: wafer centering Message-ID: wafer centering slightly off. Checked and slowed down carriage belt speed. Adjsted centering blocks to improve centering. All OK now. From gsosa at snf.stanford.edu Fri Jun 18 10:57:53 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Jun 2010 10:57:53 -0700 Subject: Comment svgcoat2 SNF 2010-06-18 10:57:52: 955 0.7um Thickness 6/18 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(9 points): 6878 Angstroms, Std Dev. 6 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From gsosa at snf.stanford.edu Fri Jun 18 13:10:58 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 18 Jun 2010 13:10:58 -0700 Subject: Problem svgcoat2 SNF 2010-06-18 13:10:58: 3612 dripping Message-ID: Do not use 3612 process. There are air bubbles in the dispense line and suckback is not working. Purged the pump/bottle many times with no success Need to investigate further. Please process 3612 photoresist on track #1. From mahnaz at snf.stanford.edu Fri Jun 18 16:09:15 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 18 Jun 2010 16:09:15 -0700 Subject: Problem svgcoat2 SNF 2010-06-18 16:09:15: 3612 no suck back Message-ID: Mario and I played little more this afternoon with no success. Every other wafer big drop falles on the wf. either the valve is bad or the pump. we will continue on Monday. y From gsosa at snf.stanford.edu Mon Jun 21 09:36:25 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Jun 2010 09:36:25 -0700 Subject: Problem svgcoat2 SNF 2010-06-18 13:10:58: 3612 dripping Message-ID: Checked and found kinked pnuematic air hose to suckback valve. I suspect that I may have done this while troubleshooting. Unkinked the pneumatic line, Purged resist. Suckback looks good and no dripping. Cycled 8 wafers through with standard program. All looks normal. Cleaned all coater dummy wafers. From gsosa at snf.stanford.edu Mon Jun 21 09:36:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 21 Jun 2010 09:36:32 -0700 Subject: Problem svgcoat2 SNF 2010-06-18 16:09:15: 3612 no suck back Message-ID: Checked and found kinked pnuematic air hose to suckback valve. I suspect that I may have done this while troubleshooting. Unkinked the pneumatic line, Purged resist. Suckback looks good and no dripping. Cycled 8 wafers through with standard program. All looks normal. Cleaned all coater dummy wafers. From gsosa at snf.stanford.edu Fri Jun 25 15:28:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 25 Jun 2010 15:28:19 -0700 Subject: Comment svgcoat2 SNF 2010-06-25 15:28:18: 955 0.7um Thickness 6/25 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(9 points): 6910 Angstroms, Std Dev. 8 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.