Problem svgcoat2 SNF 2010-05-29 20:05:56: Coating chuck belt drive doesn't work

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jun 1 07:25:54 PDT 2010


checked belts , Ok, Secondary Resist contaiment was Probably full , I 
 found the Alarm  On top Turned Off , checked system and cycled wafers
System ok to use. 




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