Comment svgcoat2 SNF 2010-06-07 14:13:45: 955 0.7um Thickness Test 6/7

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jun 7 14:13:45 PDT 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6953  Angstroms, Std Dev. 12 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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