Problem svgcoat2 SNF 2010-06-18 13:10:58: 3612 dripping

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Jun 18 13:10:58 PDT 2010


Do not use 3612 process. There are air bubbles in the dispense line and suckback is not working. Purged the pump/bottle many times with no success Need to investigate further. Please process 3612 photoresist on track #1.




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