Problem svgcoat2 SNF 2010-06-18 16:09:15: 3612 no suck back

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Jun 21 09:36:32 PDT 2010


Checked and found kinked pnuematic air hose to suckback valve. I suspect that I may have done this while troubleshooting. Unkinked the pneumatic line, Purged resist. Suckback looks good and no dripping. Cycled 8 wafers through with standard program. All looks normal. Cleaned all coater dummy wafers.




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