Problem svgcoat2 SNF 2010-03-10 03:22:38: Track leaving marks on backside again

damodei at snf.stanford.edu damodei at snf.stanford.edu
Wed Mar 10 03:22:38 PST 2010


Track is leaving large marks on the backside of wafers.  Had to clean them and put them into the SRD twice before they could go in the ASML.




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