Problem svgcoat2 SNF 2010-03-10 03:22:38: Track leaving marks on backside again

vilanova at vilanova at
Wed Mar 10 07:59:27 PST 2010

Sorry but I couldnt repeat the problem ,  I cycled many dummy wafers
and the Back side is clean no tracks or resist  or ebr residues On wafer
The Only thing I can think of is that Maybe someone was trying to clean
the dummy wafers Before that and left acetone residues all over. Tested ok to use. 

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