Problem svgcoat2 SNF 2010-03-10 03:22:38: Track leaving marks on backside again

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 10 07:59:27 PST 2010


Sorry but I couldnt repeat the problem ,  I cycled many dummy wafers
and the Back side is clean no tracks or resist  or ebr residues On wafer
The Only thing I can think of is that Maybe someone was trying to clean
the dummy wafers Before that and left acetone residues all over. Tested ok to use. 




More information about the svgcoat2-pcs mailing list