Problem svgcoat2 SNF 2010-03-14 04:05:29: broke SOI

rostam at snf.stanford.edu rostam at snf.stanford.edu
Sun Mar 14 04:05:30 PDT 2010


coater worked fine for all test wafers. for SOI wafers, for some reason the thing that holds the wafer and align it over the coater is maybe a little too low. One side of the soi wafers passed over it and so the wafer was miss aligned and coater broke wafer after starting to spin.
the same thing happened with all SOI wafers. had to stop the coater and manually align the wafer over the coater.




More information about the svgcoat2-pcs mailing list