Problem svgcoat2 SNF 2010-03-14 04:05:29: broke SOI

rostam at rostam at
Sun Mar 14 04:05:30 PDT 2010

coater worked fine for all test wafers. for SOI wafers, for some reason the thing that holds the wafer and align it over the coater is maybe a little too low. One side of the soi wafers passed over it and so the wafer was miss aligned and coater broke wafer after starting to spin.
the same thing happened with all SOI wafers. had to stop the coater and manually align the wafer over the coater.

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