Problem svgcoat2 SNF 2010-03-14 04:05:29: broke SOI

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 15 09:09:07 PDT 2010

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Removed broken wafer, cleaned chuck and catch cup, Checked
Centering tabs & chuck centering, cycled wafers, Ok to use.

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