Problem svgcoat2 SNF 2010-03-14 22:05:03: coater chuck dirty with PR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 15 09:09:16 PDT 2010


Removed broken wafer, cleaned chuck and catch cup, Checked
Centering tabs & chuck centering, cycled wafers, Ok to use.




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