Comment svgcoat2 SNF 2010-03-11 08:21:43: Cleaned catch cup belts, hotplate , Cooling Station....

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 15 09:09:22 PDT 2010


Removed broken wafer, cleaned chuck and catch cup, Checked
Centering tabs & chuck centering, cycled wafers, Ok to use.




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