Problem svgcoat2 SNF 2010-03-16 17:42:04: Wafer centering off
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Wed Mar 17 08:47:30 PDT 2010
adjusted wafer centering tabs, cycled wafers Using recipe
2mm EBR , wafer centering and 2MM EBR Good,
cleaned dummy wafers, Ok to use.
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