Problem svgcoat2 SNF 2010-03-16 17:42:04: Wafer centering off

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 17 08:47:30 PDT 2010


adjusted wafer centering tabs, cycled wafers Using recipe
2mm EBR , wafer centering and 2MM EBR  Good, 
cleaned dummy wafers, Ok to use. 




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