Comment svgcoat2 SNF 2010-03-21 17:57:04: Track not moving wafers

usha at snf.stanford.edu usha at snf.stanford.edu
Sun Mar 21 17:57:05 PDT 2010


Coated two wafers w/o problem.  Third wafer after coat did not move.  
Reset tool and tried again.  Did not pick up wafer.  Working okay in the manual mode.




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