Comment svgcoat2 SNF 2010-03-21 17:57:04: Track not moving wafers
usha at snf.stanford.edu
usha at snf.stanford.edu
Sun Mar 21 17:57:05 PDT 2010
Coated two wafers w/o problem. Third wafer after coat did not move.
Reset tool and tried again. Did not pick up wafer. Working okay in the manual mode.
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