Problem svgcoat2 SNF 2010-03-20 08:55:40: Lack of 3612 PR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 22 07:35:10 PDT 2010


User replaced 3612 Resist bottle Reintialized track  Emptied Resist 
secondary recovery container
and cycled wafers ,System Ok. 




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