Comment svgcoat2 SNF 2010-03-21 17:57:04: Track not moving wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 22 07:35:21 PDT 2010


User replaced 3612 Resist bottle Reintialized track  Emptied Resist 
secondary recovery container
and cycled wafers ,System Ok. 




More information about the svgcoat2-pcs mailing list