Problem svgcoat2 SNF 2010-03-23 18:19:13: no 220-3 resist dispensed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 24 07:58:47 PDT 2010


checked system and cycled Recipe 3 ( 220-3) dispensing is good ebr 
is good, Ok to use. 




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