Problem svgcoat2 SNF 2010-03-24 19:52:24: vapor prime not working

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Mar 25 08:02:40 PDT 2010


Cleaned resist residues from vapor prime, cleaned post bake 
hotplate, Emptied resist small recovery container, cycled wafers, Ok to 
use. 




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