From mtan at snf.stanford.edu Sun May 2 10:11:42 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 2 May 2010 10:11:42 -0700 Subject: Comment svgcoat2 SNF 2010-05-02 10:11:40: spin track has problem accepting wafers Message-ID: happens 1 in 7 tries From narii at snf.stanford.edu Mon May 3 02:42:34 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Mon, 3 May 2010 02:42:34 -0700 Subject: Problem svgcoat2 SNF 2010-05-03 02:42:33: A wafer inside spinner Message-ID: I found a wafer attached to the inside of the spinner. Tried to remove it, but it stuck and won't fall. From vilanova at snf.stanford.edu Mon May 3 08:30:25 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 May 2010 08:30:25 -0700 Subject: Problem svgcoat2 SNF 2010-04-30 17:00:27: 1 um wo/vp 2mm ebr Message-ID: Cleaned & Removed Resist From HMDS Hotplate, Cleaned Catch cup , removed broken wafer and cleaned resist from Chuck, If the system gets full of resist BECAUSE SOMEONE RAN A WAFER UPSIDE DOWN! Do not expect the system to work properly! adjusted centering tabs and EBR nozzle, cycled wafers, 2 mm ebr looks Good, Ok to use. From vilanova at snf.stanford.edu Mon May 3 08:30:36 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 May 2010 08:30:36 -0700 Subject: Comment svgcoat2 SNF 2010-05-02 10:11:40: spin track has problem accepting wafers Message-ID: Cleaned & Removed Resist From HMDS Hotplate, Cleaned Catch cup , removed broken wafer and cleaned resist from Chuck, If the system gets full of resist BECAUSE SOMEONE RAN A WAFER UPSIDE DOWN! Do not expect the system to work properly! adjusted centering tabs and EBR nozzle, cycled wafers, 2 mm ebr looks Good, Ok to use. From vilanova at snf.stanford.edu Mon May 3 08:30:42 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 3 May 2010 08:30:42 -0700 Subject: Problem svgcoat2 SNF 2010-05-03 02:42:33: A wafer inside spinner Message-ID: Cleaned & Removed Resist From HMDS Hotplate, Cleaned Catch cup , removed broken wafer and cleaned resist from Chuck, If the system gets full of resist BECAUSE SOMEONE RAN A WAFER UPSIDE DOWN! Do not expect the system to work properly! adjusted centering tabs and EBR nozzle, cycled wafers, 2 mm ebr looks Good, Ok to use. From yeh at snf.stanford.edu Thu May 6 11:38:14 2010 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Thu, 6 May 2010 11:38:14 -0700 Subject: Problem svgcoat2 SNF 2010-05-06 11:38:14: poor uniformity on 3612 and 220 resist Message-ID: from 5/5/10, ~7pm: 3612 - after 3 dummy wafers, thickness is visibly un-even 220, 4um - after 5 dummy wafers, thickness is also visibly un-even From vilanova at snf.stanford.edu Thu May 6 14:07:35 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 6 May 2010 14:07:35 -0700 Subject: Problem svgcoat2 SNF 2010-05-06 11:38:14: poor uniformity on 3612 and 220 resist Message-ID: purged line and lubricated dispense arm rail, Cycled wafers , Uniformity Looks Good ( show Wafers to Mahnaz) Good to use. From gsosa at snf.stanford.edu Fri May 7 14:11:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 May 2010 14:11:49 -0700 Subject: Comment svgcoat2 SNF 2010-05-07 14:11:48: 955 0.7 Thickness 5/6 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6860 Angstroms, Std Dev. 14 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From dton at snf.stanford.edu Sun May 9 17:48:48 2010 From: dton at snf.stanford.edu (dton at snf.stanford.edu) Date: Sun, 9 May 2010 17:48:48 -0700 Subject: Problem svgcoat2 SNF 2010-05-09 17:48:48: primer Message-ID: Primer oven has an alarm status : HPO/VP vacuum brk. From vilanova at snf.stanford.edu Mon May 10 08:22:23 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 May 2010 08:22:23 -0700 Subject: Problem svgcoat2 SNF 2010-05-09 17:48:48: primer Message-ID: the HMDS Primer Wasnt working because someone Broke a wafer In the Coat Station , this is why HMDS didnt want to continue the chuck was missing a wafer, Removed broken Pieces, Cleaned and removed excess of resist from Hotplates, cleaned Catch cup and dummy wafers Cycled Wafers , Ok to use. From cursive at snf.stanford.edu Wed May 12 22:32:10 2010 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 12 May 2010 22:32:10 -0700 Subject: Problem svgcoat2 SNF 2010-05-12 22:32:09: 3um PR thickness problem Message-ID: no PR on wafer after coating. There is still PR inside the bottle. From vilanova at snf.stanford.edu Thu May 13 09:55:06 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 May 2010 09:55:06 -0700 Subject: Problem svgcoat2 SNF 2010-05-12 22:32:09: 3um PR thickness problem Message-ID: 3um Resist pump Re initialized, working fine, also Cleaned catch cup Remoev broken wafers and........... Blue Dicing Tape? from Inside the catch cup, Cleaned hotplate, Cycled wafers Ok to use. From mahnaz at snf.stanford.edu Thu May 13 14:21:59 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 13 May 2010 14:21:59 -0700 Subject: Problem svgcoat2 SNF 2010-05-13 14:21:59: 1um 955 no good Message-ID: after 5 dummies wafer came out nonunifor, bad EBR and not enough covrage. Pretty BAD. From vilanova at snf.stanford.edu Thu May 13 14:43:18 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 13 May 2010 14:43:18 -0700 Subject: Problem svgcoat2 SNF 2010-05-13 14:21:59: 1um 955 no good Message-ID: cycled wafers and Uniformity and EBR looks Good,. Maybe there was something Wrong with the User wafers, User will clean wafers and try it again later . From narii at snf.stanford.edu Thu May 13 17:15:54 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Thu, 13 May 2010 17:15:54 -0700 Subject: Problem svgcoat2 SNF 2010-05-13 17:15:53: Wafers off-center at spinner Message-ID: Wafer doesn't seems to align well with the spinner, it is slightly off-center From vilanova at snf.stanford.edu Fri May 14 07:56:40 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 May 2010 07:56:40 -0700 Subject: Problem svgcoat2 SNF 2010-05-13 17:15:53: Wafers off-center at spinner Message-ID: re adjusted centering tabs and tested with centering wafer piece, Cycled wafers Using the 2mm EBR step program, EBR back to 2mm , ok to use. From xzhuan1 at snf.stanford.edu Fri May 14 12:18:28 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 14 May 2010 12:18:28 -0700 Subject: Problem svgcoat2 SNF 2010-05-14 12:18:28: 3um pr Message-ID: no pr is dispensed on wafer during coating. From vilanova at snf.stanford.edu Fri May 14 13:57:16 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 14 May 2010 13:57:16 -0700 Subject: Problem svgcoat2 SNF 2010-05-14 12:18:28: 3um pr Message-ID: checked bottle 2 make sure was full Empty carboy initialized pump, ( 3um Resist dispensing Properly, ok to use. From mahnaz at snf.stanford.edu Mon May 17 10:28:38 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 17 May 2010 10:28:38 -0700 Subject: Problem svgcoat2 SNF 2010-05-17 10:28:38: ebr not centered Message-ID: From lindaw at snf.stanford.edu Mon May 17 14:42:23 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 17 May 2010 14:42:23 -0700 Subject: Problem svgcoat2 SNF 2010-05-17 14:42:21: wafers loading off center Message-ID: The belts are driving my wafers over the alignment blocks, that appear to not be rising fully into position to stop the wafers to center them to the spin chuck. 1mm thick wafer off center = KABLOOEY! From gsosa at snf.stanford.edu Tue May 18 07:03:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 May 2010 07:03:54 -0700 Subject: Problem svgcoat2 SNF 2010-05-17 10:28:38: ebr not centered Message-ID: Adjusted wafer centering with target wafer. From gsosa at snf.stanford.edu Tue May 18 07:06:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 18 May 2010 07:06:36 -0700 Subject: Problem svgcoat2 SNF 2010-05-17 14:42:21: wafers loading off center Message-ID: Adjusted height of front centering device so that wafer does not travel over the centering device and cause a mis-centered wafer. Tested with dummy wafers. From yiwu at snf.stanford.edu Thu May 20 16:37:24 2010 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Thu, 20 May 2010 16:37:24 -0700 Subject: Comment svgcoat2 SNF 2010-05-20 16:37:24: sender index doesn't work... Message-ID: From rostam at snf.stanford.edu Thu May 20 19:31:49 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Thu, 20 May 2010 19:31:49 -0700 Subject: Problem svgcoat2 SNF 2010-05-20 19:31:48: wafer doesn't move from sender cassette to prime Message-ID: From vilanova at snf.stanford.edu Thu May 20 22:07:17 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 May 2010 22:07:17 -0700 Subject: Comment svgcoat2 SNF 2010-05-20 16:37:24: sender index doesn't work... Message-ID: Must of the time is not the indexer but the metal cassette that does not sit flat on the indexer therefore the Indexer sensor doesnt work properly. From vilanova at snf.stanford.edu Thu May 20 22:07:28 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 May 2010 22:07:28 -0700 Subject: Problem svgcoat2 SNF 2010-05-20 19:31:48: wafer doesn't move from sender cassette to prime Message-ID: Must of the time is not the indexer but the metal cassette that does not sit flat on the indexer therefore the Indexer sensor doesnt work properly. From gsosa at snf.stanford.edu Fri May 21 09:11:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 May 2010 09:11:32 -0700 Subject: Comment svgcoat2 SNF 2010-05-21 09:11:32: 955 0.7um Thickness 5/21 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(9 points): 6901 Angstroms, Std Dev. 10 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From rik at snf.stanford.edu Mon May 24 18:51:57 2010 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 24 May 2010 18:51:57 -0700 Subject: Problem svgcoat2 SNF 2010-05-24 18:51:56: Out of 955 resist Message-ID: Could not find any replacement bottles in back. From vilanova at snf.stanford.edu Tue May 25 07:30:03 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 May 2010 07:30:03 -0700 Subject: Problem svgcoat2 SNF 2010-05-24 18:51:56: Out of 955 resist Message-ID: Someone Found a 955 Resist gallon and replaced it, last night. ( I Got another one from the chemical Room this morning Just in case I will put it back in the chemical room) checked Ok to use. From dkozak at snf.stanford.edu Wed May 26 03:56:25 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Wed, 26 May 2010 03:56:25 -0700 Subject: Comment svgcoat2 SNF 2010-05-26 03:56:24: wafers loaded to the edge of prime oven Message-ID: when wafers are taken from cassette and transferred to prime oven, the wafer lands on the edge of the plate, causing alarm. have to prime/pre-bake in Yes oven From vilanova at snf.stanford.edu Wed May 26 07:55:38 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 May 2010 07:55:38 -0700 Subject: Comment svgcoat2 SNF 2010-05-26 03:56:24: wafers loaded to the edge of prime oven Message-ID: the wafer loader transfer belt was out of the pulley and right on top of the wafer sensor, that's why the HMDS part wasnt working at all, I re installed the Belt and cycled wafers, ok to use. From bchui at snf.stanford.edu Sat May 29 20:05:57 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 29 May 2010 20:05:57 -0700 Subject: Problem svgcoat2 SNF 2010-05-29 20:05:56: Coating chuck belt drive doesn't work Message-ID: Have to manually place the wafer on the chuck then fake out the sensors to get the dispense to start