Problem svgcoat2 SNF 2010-04-30 17:00:27: 1 um wo/vp 2mm ebr

vilanova at vilanova at
Mon May 3 08:30:25 PDT 2010

Cleaned & Removed Resist From HMDS Hotplate, Cleaned Catch cup , removed broken wafer and cleaned resist from Chuck,
If the system gets full of resist BECAUSE SOMEONE RAN A WAFER 
UPSIDE DOWN!  Do not expect the system to work properly! 
adjusted centering tabs and EBR nozzle, cycled wafers,
2 mm ebr looks Good, Ok to use. 

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