Problem svgcoat2 SNF 2010-05-03 02:42:33: A wafer inside spinner

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 3 08:30:42 PDT 2010


Cleaned & Removed Resist From HMDS Hotplate, Cleaned Catch cup , removed broken wafer and cleaned resist from Chuck,
If the system gets full of resist BECAUSE SOMEONE RAN A WAFER 
UPSIDE DOWN!  Do not expect the system to work properly! 
adjusted centering tabs and EBR nozzle, cycled wafers,
2 mm ebr looks Good, Ok to use. 




More information about the svgcoat2-pcs mailing list