Problem svgcoat2 SNF 2010-05-06 11:38:14: poor uniformity on 3612 and 220 resist

yeh at snf.stanford.edu yeh at snf.stanford.edu
Thu May 6 11:38:14 PDT 2010


from 5/5/10, ~7pm:
3612 - after 3 dummy wafers, thickness is visibly un-even
220, 4um - after 5 dummy wafers, thickness is also visibly un-even




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