Problem svgcoat2 SNF 2010-05-06 11:38:14: poor uniformity on 3612 and 220 resist

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu May 6 14:07:35 PDT 2010


purged line and lubricated dispense arm rail,
Cycled wafers , Uniformity Looks Good ( show Wafers to Mahnaz)
Good to use. 




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