Problem svgcoat2 SNF 2010-05-09 17:48:48: primer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon May 10 08:22:23 PDT 2010


the HMDS Primer Wasnt working because someone Broke a 
wafer In the Coat Station , this is why  HMDS didnt want to continue
the chuck was missing a wafer, Removed  broken Pieces, Cleaned and
removed excess of resist from Hotplates, cleaned Catch cup and
 dummy wafers Cycled Wafers , Ok to use. 




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