Problem svgcoat2 SNF 2010-05-12 22:32:09: 3um PR thickness problem

vilanova at vilanova at
Thu May 13 09:55:06 PDT 2010

3um Resist pump Re initialized, working fine, also Cleaned
catch cup Remoev broken wafers and........... Blue Dicing Tape?
from Inside the catch cup, Cleaned hotplate, Cycled wafers
Ok to use. 

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