Problem svgcoat2 SNF 2010-05-13 17:15:53: Wafers off-center at spinner

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri May 14 07:56:40 PDT 2010


re adjusted centering tabs and tested with centering
wafer piece, Cycled wafers Using the 2mm EBR step 
program, EBR back to 2mm , ok to use. 




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