Problem svgcoat2 SNF 2010-05-14 12:18:28: 3um pr
xzhuan1 at snf.stanford.edu
xzhuan1 at snf.stanford.edu
Fri May 14 12:18:28 PDT 2010
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Problem svgcoat2 SNF 2010-05-13 17:15:53: Wafers off-center at spinner
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Problem svgcoat2 SNF 2010-05-14 12:18:28: 3um pr
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no pr is dispensed on wafer during coating.
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Problem svgcoat2 SNF 2010-05-13 17:15:53: Wafers off-center at spinner
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Problem svgcoat2 SNF 2010-05-14 12:18:28: 3um pr
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