Problem svgcoat2 SNF 2010-05-17 14:42:21: wafers loading off center

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Mon May 17 14:42:23 PDT 2010


The belts are driving my wafers over the alignment blocks, that appear to not be rising fully into position to stop the wafers to center them to the spin chuck.  1mm thick wafer off center = KABLOOEY!




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