Comment svgcoat2 SNF 2010-05-21 09:11:32: 955 0.7um Thickness 5/21

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 21 09:11:32 PDT 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(9 points): 6901  Angstroms, Std Dev. 10 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




More information about the svgcoat2-pcs mailing list