Comment svgcoat2 SNF 2010-05-26 03:56:24: wafers loaded to the edge of prime oven
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Wed May 26 07:55:38 PDT 2010
the wafer loader transfer belt was out of the pulley and right on top
of the wafer sensor, that's why the HMDS part wasnt working at
all, I re installed the Belt and cycled wafers, ok to use.
More information about the svgcoat2-pcs
mailing list