Problem svgcoat2 SNF 2010-05-29 20:05:56: Coating chuck belt drive doesn't work

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sat May 29 20:05:57 PDT 2010

Previous message: Comment svgcoat2 SNF 2010-05-26 03:56:24: wafers loaded to the edge of prime oven
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Have to manually place the wafer on the chuck then fake out the sensors to get the dispense to start

Previous message: Comment svgcoat2 SNF 2010-05-26 03:56:24: wafers loaded to the edge of prime oven
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